One Atom Transistor

Quantum tunneling at a single atom has been harnessed for an entangled logic device.
This is the twenty first century I've longed for.
The research is reported here from the US.

This is almost the same story as the New South Wales research.  The image attached is from that.

NSW image, taken I believe with a quantum
tunneling miscroscope.

How was it set up?  A silicon chip received a one atom layer of hydrogen.  An individual H atom was zapped and replaced by a Phosphorous atom.  Heating the chip disposed of the H atoms.  I don't have to understand the detail to know this is significant, to operate finely at a new order of magnitude.